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Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the target.

The measurement technique enables measurements against all conducting and semiconducting objects. Micro-Epsilon has extended the capacitive measurement principle with some innovative functions, which enable highly linear output characteristics, nanometer-precise resolution and very stable measurements to be obtained. The linear characteristic of the measurement signal is obtained for measurements with respect to target objects of electrically-conducting materials without any additional electronic linearization.

The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for test-rig applications. The capaNCDT system 6300/6310 and 6500 also measure against insulating materials.
Unit of Measure

Specifications

Operating Temperature

 N/A -269 to 200 ºC

Application

N/A

  • Clean room
  • Ultra-high vacuum

Sensor Models Produced

N/A

  • capaNCDT CSH
  • capaNCDT CSH-FL

Features

N/A

  • Best temperature stability
  • Application in clean room and ultra high vacuum
  • Special sensor designs
  • Operating temperature between -269 ºC to 200 ºC
  • Standardized production process

Additional Information

N/A Capacitive sensors with Embedded Capa Technology are manufactured using a revolutionary type of production process. The new technology is also used for eddy current sensors. This means a significantly increased service life for the capacitive sensors is possible. Due to the embedding of the electrode in a very stable carrier material, significantly improved temperature stability is achieved when compared to conventional sensors currently available on the market. The brand new sensors can also be used in temperatures up to 200 ºC; even very low temperatures down to -269 ºC can be achieved. ECT enables significantly more freedom of design for the capacitive sensors. For example, the capaNCDT CSH-FL sensors have an installation height of just 4 mm.