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Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the target.

The measurement technique enables measurements against all conducting and semiconducting objects. Micro-Epsilon has extended the capacitive measurement principle with some innovative functions, which enable highly linear output characteristics, nanometer-precise resolution and very stable measurements to be obtained. The linear characteristic of the measurement signal is obtained for measurements with respect to target objects of electrically-conducting materials without any additional electronic linearization.

The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for test-rig applications. The capaNCDT system 6300/6310 and 6500 also measure against insulating materials.
Unit of Measure

Specifications

Measurement Range

 N/A 0.05 to 10 mm

Linearity

 N/A ± 0.05 % (Sensor and Controller are Matched)

Resolution

 N/A 0.000075 %

Bandwidth

 N/A 8.5 kHz-3 dB

Number of Channels

 N/A Up to 8

Specific Sensors for OEM Applications

N/A Micro Epsilon can customize a sensor to fit your individual needs:

  • Adjusting the body shape and size for mounting
  • Modify the sensor material
  • Cable arrangements
  • Miniaturizing
  • Cryogenic or high temperature environment
  • Integrated electronic and sensor for OEM design

Large Selection of Capacitive Sensors

N/A Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra-high vacuums is also possible.

Advantages

N/A

  • Superior precision and resolution
  • Excellent temperature stability
  • Outstanding long-term stability
  • Material-independent for metallic targets
  • For any conductive target/semi-conductive target

Additional Information

N/A Web interface
Configuration of capaNCDT 6200 and 6500 is carried out using a web browser interface

Even under extreme conditions on a test-rig, capacitive sensors supply the highest precision here, the wear on a brake disc is being measured.

Capacitive displacement sensors measure with the highest precision the alignment of the lens system used for semiconductor wafer lithography.