Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the target.

The measurement technique enables measurements against all conducting and semiconducting objects. Micro-Epsilon has extended the capacitive measurement principle with some innovative functions, which enable highly linear output characteristics, nanometer-precise resolution and very stable measurements to be obtained. The linear characteristic of the measurement signal is obtained for measurements with respect to target objects of electrically-conducting materials without any additional electronic linearization.

The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for test-rig applications. The capaNCDT system 6300/6310 and 6500 also measure against insulating materials.