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Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the target.

The measurement technique enables measurements against all conducting and semiconducting objects. Micro-Epsilon has extended the capacitive measurement principle with some innovative functions, which enable highly linear output characteristics, nanometer-precise resolution and very stable measurements to be obtained. The linear characteristic of the measurement signal is obtained for measurements with respect to target objects of electrically-conducting materials without any additional electronic linearization.

The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for test-rig applications. The capaNCDT system 6300/6310 and 6500 also measure against insulating materials.
capaNCDT 6200/6500 Modular Multi-Channel Capacitive Non-Contact Displacement Sensors
Unit of Measure
1 

Item #

Item Name

Measurement Range

Linearity

Resolution

Bandwidth

6200 N/A capaNCDT 6200 Modular Multi-Channel Capacitive Non-Contact Displacement Sensors N/A 0.05 to 10 mm N/A ± 0.2 % N/A 0.004 % N/A 5 kHz-3 dB
6500 N/A capaNCDT 6500 Modular Multi-Channel Capacitive Non-Contact Displacement Sensors N/A 0.05 to 10 mm N/A ± 0.05 % (Sensor and Controller are Matched) N/A 0.000075 % N/A 8.5 kHz-3 dB
Unit of Measure
1