Measuring Range |
N/A 2.1 mm |
Approximate Start of Measuring Range |
N/A 19 mm |
Resolution |
N/A <30 pm |
Note for Resolution |
N/A Measuring rate 0.5 kHz, moving average over 64 values, measured differentially between the front and back of a thin glass plate in the mid of the measuring range (2 sigma) |
Continuously Adjustable Measuring Rate |
N/A 100 Hz to 6 kHz |
Linearity |
N/A <±10 nm |
Note for Linearity |
N/A Maximum deviation from reference system over entire measuring range, measured on front surface of ND filter |
Typical Temperature Stability Linearity |
N/A 0.1 nm/K |
Controller Temperature-Compensated Stability between 15 to 35 Degree Celsius (ºC) Temperature |
N/A <10 ppm |
Note for Typical Temperature Stability Linearity |
N/A Without offset displacement |
Light Source - Near Infrared Range (NIR) Superluminescent Light Emitting Diodes (SLED) Wavelength |
N/A 840 nm |
Laser Safety Class |
N/A Class 1 in accordance with DIN EN 60825-1: 2015-07 |
Light Spot Diameter |
N/A 10 µm |
Note for Light Spot Diameter |
N/A In the mid of the measuring range |
Maximum Tilt Angle |
N/A ±2 º |
Note for Maximum Tilt Angle |
N/A Maximum sensor tilt angle that produces a usable signal on polished glass (n = 1.5) in the mid of the measuring range. The accuracy decreases when approaching the limit values. |
Target Material |
N/A Diffuse Surfaces Glass Reflecting |
Note for Target Material |
N/A Non-transparent materials require an optically dense surface with a wavelength of 840 nm. |
Direct Current (DC) Supply Voltage (± 15 Percent (%)) |
N/A 24 V |
Approximate Power Consumption at 24 Volts (V) Voltage |
N/A 10 W |
Signal Input |
N/A Sync in, Trigger in, 2 x encoders (A+, A-, B+, B-, index) |
Digital Interface |
N/A Ethernet/EtherCAT/RS422 |
Analog Output Current |
N/A 4 to 20 mA |
Analog Output Voltage |
N/A 0 to 10 V |
Digital to Analog (DA) Output |
N/A 16 bits |
Switching Output |
N/A Error1-Out Error2-Out |
Digital Output |
N/A Sync out |
Optical Connection |
N/A Bending radius: static 30 mm, dynamic 40 mm pluggable optical fiber via E2000 socket (controller) and FC socket (sensor) Standard length 3 m, 5 m and 10 m; other cable lengths on request |
Electrical Connection |
N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m, 30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m) |
Sensor Installation |
N/A Clamping Mounting Adapter |
Controller Installation |
N/A DIN Rail Mounting Free-Standing |
Storage Temperature Range |
N/A -20 to 70 ºC |
Sensor Operation Temperature Range |
N/A 5 to 70 ºC |
Controller Operation Temperature Range |
N/A 15 to 35 ºC |
Shock (DIN-EN 60068-2-27) |
N/A 6 ms in XY axis, 1000 shocks each 15 g |
Vibration (DIN-EN 60068-2-6) |
N/A 20 to 500 Hz in XY axis, 10 cycles each 2 g |
| Protection Class (DIN-EN 60529)1 | N/A Ingress Protection (IP40) |
| Optional Vacuum2 | N/A Ultra-High Vacuum (UHV) |
Sensor Material |
N/A Stainless steel |
Controller Housing Material |
N/A Aluminum, Passive Cooling |
Control and Display Element |
N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Pilot laser: switchable for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management |
Characteristics |
N/A
|
Additional Information |
N/A
Designed for high-resolution distance measurements in clean rooms & vacuum The white light interferometer IMS5600-DS is used for distance measurements with highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, e.g., in electronics and semiconductor production. For vacuum applications, Micro-Epsilon offers special sensors, cables and feed-through accessories. These sensors and cables are particle-free to a high degree and can even be used in UHV. Absolute distance measurement with large measuring range and offset distance The IMS5600-DS is used for high-precision displacement and distance measurements. The system provides absolute measurement values and can therefore also be used for distance measurement of step profiles. Thanks to the absolute measurement, sampling is performed without signal loss. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected. The measuring system offers sub-nanometer resolution with a large offset distance in relation to the measuring range. Integration in industrial environments Robust sensors and a controller in a metal housing make the IMS5600-DS ideally suitable for integration into production lines. These compact sensors are extremely space saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Highly flexible fiber optic cables are available in lengths up to 20 m and allow a spatial separation of sensor and controller. Unlike other conventional interferometers, initial operations and parameter set up are easy and user-friendly via a web interface. No software installation is required. |
