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  • High-Precision White Light Interferometers for Non-Contact Distance and Thickness Measurements
The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.
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Item #

Item Name

Resolution

Linearity

Light Spot Diameter

Maximum Tilt Angle

N/A White Light Interferometer for Absolute Distance Measurement and Nanometer Accuracy N/A <1 nm N/A <±50 nm N/A 10 µm N/A ±2 º
N/A 45 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy N/A <1 nm N/A <±100 nm N/A 10 µm N/A ±2 º
N/A 70 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy N/A <1 nm N/A <±200 nm N/A 5 µm N/A ±4.5 º
N/A White Light Interferometer for Absolute Distance Measurement and Subnanometer Accuracy N/A <30 pm N/A <±10 nm N/A 10 µm N/A ±2 º
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