Item # |
Item Name |
Resolution |
Linearity |
Light Spot Diameter |
Maximum Tilt Angle |
---|---|---|---|---|---|
IMS5400-DS /Asset/a1587.jpg | N/A White Light Interferometer for Absolute Distance Measurement and Nanometer Accuracy | Resolution N/A <1 nm | Linearity N/A <±50 nm | Light Spot Diameter N/A 10 µm | Maximum Tilt Angle N/A ±2 º |
IMS5400-TH45 /Asset/a1584.jpg | N/A 45 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy | Resolution N/A <1 nm | Linearity N/A <±100 nm | Light Spot Diameter N/A 10 µm | Maximum Tilt Angle N/A ±2 º |
IMS5400-TH70 /Asset/a1584.jpg | N/A 70 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy | Resolution N/A <1 nm | Linearity N/A <±200 nm | Light Spot Diameter N/A 5 µm | Maximum Tilt Angle N/A ±4.5 º |
IMS5600-DS /Asset/a1580.jpg | N/A White Light Interferometer for Absolute Distance Measurement and Subnanometer Accuracy | Resolution N/A <30 pm | Linearity N/A <±10 nm | Light Spot Diameter N/A 10 µm | Maximum Tilt Angle N/A ±2 º |