High-Precision White Light Interferometers for Non-Contact Distance and Thickness Measurements On Micro-Epsilon

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.

Item #	Item Name	Resolution	Linearity	Light Spot Diameter	Maximum Tilt Angle
IMS5400-DS	N/A White Light Interferometer for Absolute Distance Measurement and Nanometer Accuracy	N/A <1 nm	N/A <±50 nm	N/A 10 µm	N/A ±2 º
IMS5400-TH45	N/A 45 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy	N/A <1 nm	N/A <±100 nm	N/A 10 µm	N/A ±2 º
IMS5400-TH70	N/A 70 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy	N/A <1 nm	N/A <±200 nm	N/A 5 µm	N/A ±4.5 º
IMS5600-DS	N/A White Light Interferometer for Absolute Distance Measurement and Subnanometer Accuracy	N/A <30 pm	N/A <±10 nm	N/A 10 µm	N/A ±2 º