Working Distance |
N/A 45 mm |
Working Distance Tolerance (±) |
N/A 3.5 mm |
| Measuring Range (Thickness)1 | N/A 0.035 to 1.4 mm |
Resolution |
N/A <1 nm |
Note for Resolution |
N/A Measuring rate 0.5 kHz, moving averaging over 64 values, measured on an approx. 1 mm thick BK7 optical flat (2 sigma) |
Continuously Adjustable Measuring Rate |
N/A 100 Hz to 6 kHz |
Linearity |
N/A <±100 nm |
Note for Linearity |
N/A Maximum thickness deviation when measuring on an approx. 1 mm thick BK7 optical flat (n=1.5) when passing through the measuring range |
Temperature Stability |
N/A Sensor: Linearity valid for the entire temperature range |
Controller Temperature-Compensated Stability between 15 to 35 Degree Celsius (ºC) Temperature |
N/A <10 ppm |
Light Source - Near Infrared Range (NIR) Superluminescent Light Emitting Diodes (SLED) Wavelength |
N/A 840 nm |
Laser Safety Class |
N/A Class 1 in accordance with DIN EN 60825-1: 2015-07 |
Light Spot Diameter |
N/A 10 µm |
Note for Light Spot Diameter |
N/A With working distance = 45 mm |
Maximum Tilt Angle |
N/A ±2 º |
Note for Maximum Tilt Angle |
N/A Maximum sensor tilt angle that produces a usable signal on an approx. 0.6 mm thick BK7 optical flat in the mid of the measuring range. The accuracy decreases when approaching the limit values. |
Direct Current (DC) Supply Voltage (± 15 Percent (%)) |
N/A 24 V |
Approximate Power Consumption at 24 Volts (V) Voltage |
N/A 10 W |
Signal Input |
N/A Sync in, Trigger in, 2 x encoders (A+, A-, B+, B-, index) |
Digital Interface |
N/A Ethernet/EtherCAT/RS422 |
Analog Output Current |
N/A 4 to 20 mA |
Analog Output Voltage |
N/A 0 to 10 V |
Digital to Analog (DA) Output |
N/A 16 bits |
Switching Output |
N/A Error1-Out Error2-Out |
Digital Output |
N/A Sync out |
Optical Connection |
N/A Bending radius: static 30 mm, dynamic 40 mm pluggable optical fiber via E2000 socket (controller) and FC socket (sensor) Standard length 3 m, 5 m and 10 m; other cable lengths on request |
Electrical Connection |
N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m,30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m) |
Sensor Installation |
N/A Clamping Mounting Adapter |
Controller Installation |
N/A DIN Rail Mounting Free-Standing |
Storage Temperature Range |
N/A -20 to 70 ºC |
Sensor Operation Temperature Range |
N/A 5 to 70 ºC |
Controller Operation Temperature Range |
N/A 15 to 35 ºC |
Shock (DIN-EN 60068-2-27) |
N/A 6 ms in XY axis, 1000 shocks each 15 g |
Vibration (DIN-EN 60068-2-6) |
N/A 20 to 500 Hz in XY axis, 10 cycles each 2 g |
| Protection Class (DIN-EN 60529)2 | N/A Ingress Protection (IP40) |
| Optional Vacuum3 | N/A Ultra-High Vacuum (UHV) |
Sensor Material |
N/A Stainless steel |
Controller Housing Material |
N/A Aluminum, Passive Cooling |
Control and Display Element |
N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Pilot laser: switchable for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management |
Characteristics |
N/A
|
Additional Information |
N/A
Stable thickness measurement with varying measurement distances The IMS5400-TH white light interferometer opens up new perspectives in industrial thickness measurement. The interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage here is the distance-independent measurement, where a stable nanometer-accurate thickness value is achieved. This is how the target can move within the measuring range without influencing the accuracy. The large thickness measuring range allows the measurement of thin layers, flat glass and films. Since the white light interferometer works with an SLED in the near infrared range, it is possible to measure the thickness of optically non-dense objects such as anti-reflective coated glass. Various interfaces for advanced automation Integrated interfaces such as Ethernet, EtherCAT and RS422 as well as encoder connections, analog outputs, synchronization inputs and digital I/Os enable the connection to modern control systems and production programs. Integration in industrial environments Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. These compact sensors are extremely space-saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Cable lengths up to 20 m allow a spatial separation of sensor and controller. The sensor can be aligned easily and quickly due to the integrated pilot laser. Unlike conventional interferometers, initial operation and parameter set up are conveniently performed via web interface and do not require any software installation. |