COMPANY HEADER
Print Back
The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.
High-Precision White Light Interferometers for Non-Contact Distance and Thickness Measurements
Unit of Measure
Items White Light Interferometer for Absolute Distance Measurement and Nanometer Accuracy
IMS5400-DS
White Light Interferometer for Absolute Distance Measurement and Nanometer Accuracy 		White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy
IMS5400-TH45
45 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy 		White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy
IMS5400-TH70
70 Millimeter (mm) Working Distance White Light Interferometer for Stable Thickness Measurement and Submicron Accuracy 		White Light Interferometer for Absolute Distance Measurement and Subnanometer Accuracy
IMS5600-DS
White Light Interferometer for Absolute Distance Measurement and Subnanometer Accuracy
Measuring Range N/A 2.1 mm N/A N/A N/A 2.1 mm
Approximate Start of Measuring Range N/A 19 mm N/A N/A N/A 19 mm
Working Distance N/A N/A 45 mm N/A 70 mm N/A
Working Distance Tolerance (±) N/A N/A 3.5 mm N/A 2.1 mm N/A
Measuring Range (Thickness)1 N/A N/A 0.035 to 1.4 mm N/A 0.035 to 1.4 mm N/A
Resolution N/A <1 nm N/A <1 nm N/A <1 nm N/A <30 pm
Note for Resolution N/A Measuring rate 0.5 kHz, moving averaging over 64 values, measured at the front of a glass plate in the mid of the measuring range (2 sigma). N/A Measuring rate 0.5 kHz, moving averaging over 64 values, measured on an approx. 1 mm thick BK7 optical flat (2 sigma) N/A Measuring rate 0.5 kHz, moving averaging over 64 values, measured on an approx. 1 mm thick BK7 optical flat (2 sigma) N/A Measuring rate 0.5 kHz, moving average over 64 values, measured differentially between the front and back of a thin glass plate in the mid of the measuring range (2 sigma)
Continuously Adjustable Measuring Rate N/A 100 Hz to 6 kHz
Linearity N/A <±50 nm N/A <±100 nm N/A <±200 nm N/A <±10 nm
Note for Linearity N/A Maximum deviation from reference system over the entire measuring range, measured on front surface of ND filter N/A Maximum thickness deviation when measuring on an approx. 1 mm thick BK7 optical flat (n=1.5) when passing through the measuring range N/A Maximum thickness deviation when measuring on an approx. 1 mm thick BK7 optical flat (n=1.5) when passing through the measuring range N/A Maximum deviation from reference system over entire measuring range, measured on front surface of ND filter
Typical Temperature Stability Linearity N/A 0.1 nm/K N/A N/A N/A 0.1 nm/K
Temperature Stability N/A N/A Sensor: Linearity valid for the entire temperature range N/A Sensor: Linearity valid for the entire temperature range N/A
Controller Temperature-Compensated Stability between 15 to 35 Degree Celsius (ºC) Temperature N/A <10 ppm
Note for Typical Temperature Stability Linearity N/A Without offset displacement N/A N/A N/A Without offset displacement
Light Source - Near Infrared Range (NIR) Superluminescent Light Emitting Diodes (SLED) Wavelength N/A 840 nm
Laser Safety Class N/A Class 1 in accordance with DIN EN 60825-1: 2015-07
Light Spot Diameter N/A 10 µm N/A 10 µm N/A 5 µm N/A 10 µm
Note for Light Spot Diameter N/A In the mid of the measuring range N/A With working distance = 45 mm N/A With working distance = 45 mm N/A In the mid of the measuring range
Maximum Tilt Angle N/A ±2 º N/A ±2 º N/A ±4.5 º N/A ±2 º
Note for Maximum Tilt Angle N/A Maximum sensor tilt angle that produces a usable signal on polished glass (n = 1.5) in the mid of the measuring range. The accuracy decreases when approaching the limit values. N/A Maximum sensor tilt angle that produces a usable signal on an approx. 0.6 mm thick BK7 optical flat in the mid of the measuring range. The accuracy decreases when approaching the limit values. N/A Maximum sensor tilt angle that produces a usable signal on an approx. 0.6 mm thick BK7 optical flat in the mid of the measuring range. The accuracy decreases when approaching the limit values. N/A Maximum sensor tilt angle that produces a usable signal on polished glass (n = 1.5) in the mid of the measuring range. The accuracy decreases when approaching the limit values.
Target Material N/A Diffuse Surfaces Glass Reflecting N/A N/A N/A Diffuse Surfaces Glass Reflecting
Note for Target Material N/A Non-transparent materials require an optically dense surface with a wavelength of 840 nm. N/A N/A N/A Non-transparent materials require an optically dense surface with a wavelength of 840 nm.
Direct Current (DC) Supply Voltage (± 15 Percent (%)) N/A 24 V
Approximate Power Consumption at 24 Volts (V) Voltage N/A 10 W
Signal Input N/A Sync in, Trigger in, 2 x encoders (A+, A-, B+, B-, index)
Digital Interface N/A Ethernet/EtherCAT/RS422
Analog Output Current N/A 4 to 20 mA
Analog Output Voltage N/A 0 to 10 V
Digital to Analog (DA) Output N/A 16 bits
Switching Output N/A Error1-Out Error2-Out
Digital Output N/A Sync out
Optical Connection N/A Bending radius: static 30 mm, dynamic 40 mm pluggable optical fiber via E2000 socket (controller) and FC socket (sensor) Standard length 3 m, 5 m and 10 m; other cable lengths on request
Electrical Connection N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m, 30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m) N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m,30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m) N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m,30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m) N/A 11-pin I/O terminal strip (max. cable length 30 m) 3-pin output terminal strip (max. cable length 30 m) 3-pin supply terminal strip Encoder connection (15-pin, HD-sub socket, max. cable length 3 m, 30 m with external encoder supply) RJ45 socket for Ethernet (out)/EtherCAT (in/out) (max. cable length 100 m) RS422 connection socket (9-pin, Sub-D, max. cable length 30 m)
Sensor Installation N/A Clamping Mounting Adapter
Controller Installation N/A DIN Rail Mounting Free-Standing
Storage Temperature Range N/A -20 to 70 ºC
Sensor Operation Temperature Range N/A 5 to 70 ºC
Controller Operation Temperature Range N/A 15 to 35 ºC
Shock (DIN-EN 60068-2-27) N/A 6 ms in XY axis, 1000 shocks each 15 g
Vibration (DIN-EN 60068-2-6) N/A 20 to 500 Hz in XY axis, 10 cycles each 2 g
Protection Class (DIN-EN 60529)2 N/A Ingress Protection (IP40)
Optional Vacuum3 N/A N/A Ultra-High Vacuum (UHV) N/A Ultra-High Vacuum (UHV) N/A Ultra-High Vacuum (UHV)
Sensor Material N/A Stainless steel
Controller Housing Material N/A Aluminum, Passive Cooling
Control and Display Element N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Switchable pilot laser for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Pilot laser: switchable for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Pilot laser: switchable for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management N/A 6 x color LEDs for intensity, range, SLED, pilot laser, status and power Multifunction button: two adjustable functions and reset to factory setting after 10 s Pilot laser: switchable for sensor alignment (laser LED 635 nm, laser class 1, performance < 0.2 mW) Web interface for setup: selectable presets, freely selectable averaging possibilities, data reduction, setup management
Characteristics N/A
  • Absolute measurement with nanometer accuracy, suitable for the measurement of e.g. step profiles
  • Compact and robust sensors with large offset distance
  • Measuring rate up to 6 kHz for high speed measurements
  • Ethernet/EtherCAT/RS422
  • Robust controller with passive cooling
  • Easy configuration via web interface
 		N/A
  • Nanometer-precise thickness measurements even with varying distances and vibrating targets
  • Stable measurement from a large distance, even of anti-reflection coated targets
  • Industry optimized sensors with robust metal housing and flexible cables
  • Measuring rate up to 6 kHz for high speed measurements
  • Ethernet/EtherCAT/RS422
 		N/A
  • Nanometer-precise thickness measurements even with varying distances and vibrating targets
  • Stable measurement from a large distance, even of anti-reflection coated targets
  • Industry optimized sensors with robust metal housing and flexible cables
  • Measuring rate up to 6 kHz for high speed measurements
  • Ethernet/EtherCAT/RS422
 		N/A
  • Distance measurement with subnanometer precision
  • Best-in-Class: Resolution < 30 picometers
  • Absolute measurement, suitable for step profiles
  • Compact and robust sensors with large offset distance
  • Measuring rate up to 6 kHz for high speed measurements
  • Ethernet, EtherCAT, RS422
Additional Information N/A Absolute distance measurement with nanometer resolution
The IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.

Small light spot for the smallest of details and structures
The sensors generate a constantly small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.

Various interfaces for advanced automation
Integrated interfaces such as Ethernet, EtherCAT and RS422 as well as encoder connections, analog outputs, synchronization inputs and digital I/Os enable the connection to modern control systems and production programs.

Absolute measurement of step profiles
Unlike conventional interferometers, the IMS5400-DS also enables the measurement of step profiles. Thanks to the absolute measurement, the scanning is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

Integration in industrial environments
Robust sensors and a controller in a metal housing make the IMS5400-DS ideally suitable for integration into production lines. These compact sensors are extremely space saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Highly flexible fiber optic cables are available in lengths up to 20 m and allow a spatial separation of sensor and controller. Unlike other conventional interferometers, initial operations and parameter set up are easy and user-friendly via a web interface. No software installation is required. 		N/A Stable thickness measurement with varying measurement distances
The IMS5400-TH white light interferometer opens up new perspectives in industrial thickness measurement. The interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage here is the distance-independent measurement, where a stable nanometer-accurate thickness value is achieved. This is how the target can move within the measuring range without influencing the accuracy. The large thickness measuring range allows the measurement of thin layers, flat glass and films. Since the white light interferometer works with an SLED in the near infrared range, it is possible to measure the thickness of optically non-dense objects such as anti-reflective coated glass.

Various interfaces for advanced automation
Integrated interfaces such as Ethernet, EtherCAT and RS422 as well as encoder connections, analog outputs, synchronization inputs and digital I/Os enable the connection to modern control systems and production programs.

Integration in industrial environments
Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. These compact sensors are extremely space-saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Cable lengths up to 20 m allow a spatial separation of sensor and controller. The sensor can be aligned easily and quickly due to the integrated pilot laser. Unlike conventional interferometers, initial operation and parameter set up are conveniently performed via web interface and do not require any software installation. 		N/A Stable thickness measurement with varying measurement distances
The IMS5400-TH white light interferometer opens up new perspectives in industrial thickness measurement. The interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage here is the distance-independent measurement, where a stable nanometer-accurate thickness value is achieved. This is how the target can move within the measuring range without influencing the accuracy. The large thickness measuring range allows the measurement of thin layers, flat glass and films. Since the white light interferometer works with an SLED in the near infrared range, it is possible to measure the thickness of optically non-dense objects such as anti-reflective coated glass.

Various interfaces for advanced automation
Integrated interfaces such as Ethernet, EtherCAT and RS422 as well as encoder connections, analog outputs, synchronization inputs and digital I/Os enable the connection to modern control systems and production programs.

Integration in industrial environments
Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. These compact sensors are extremely space-saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Cable lengths up to 20 m allow a spatial separation of sensor and controller. The sensor can be aligned easily and quickly due to the integrated pilot laser. Unlike conventional interferometers, initial operation and parameter set up are conveniently performed via web interface and do not require any software installation. 		N/A Designed for high-resolution distance measurements in clean rooms & vacuum
The white light interferometer IMS5600-DS is used for distance measurements with highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, e.g., in electronics and semiconductor production. For vacuum applications, Micro-Epsilon offers special sensors, cables and feed-through accessories. These sensors and cables are particle-free to a high degree and can even be used in UHV.

Absolute distance measurement with large measuring range and offset distance
The IMS5600-DS is used for high-precision displacement and distance measurements. The system provides absolute measurement values and can therefore also be used for distance measurement of step profiles. Thanks to the absolute measurement, sampling is performed without signal loss. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected. The measuring system offers sub-nanometer resolution with a large offset distance in relation to the measuring range.

Integration in industrial environments
Robust sensors and a controller in a metal housing make the IMS5600-DS ideally suitable for integration into production lines. These compact sensors are extremely space saving and can also be integrated in confined spaces. The controller is installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. Highly flexible fiber optic cables are available in lengths up to 20 m and allow a spatial separation of sensor and controller. Unlike other conventional interferometers, initial operations and parameter set up are easy and user-friendly via a web interface. No software installation is required.
Note N/A All data at constant ambient temperature (24 ±2 ºC)
  • 1 Measuring range with n=1.5; for air gap measurement between two glass plates (n~1) the measuring range is 0.05 to 2.1 mm. The measurement object must be within the working distance
  • 2 Controller and Sensor
  • 3 Cable and Sensor